13 citations · 24 across the 3 of their papers we have counts for
3 papers
cond-mat.mtrl-sci2012★ 11 cited
New DRIE-Patterned Electrets for Vibration Energy Harvesting
S. Boisseau, A. -B. Duret, J. -J. Chaillout +1
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electr…
cond-mat.mtrl-sci2011
Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters
S. Boisseau, A. B. Duret, G. Despesse +3
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electr…
cs.OH2008★ 13 cited
A complete study of electroactive polymers for energy scavenging: modelling and experiments
C. Jean-Mistral, S. Basrour, J. J. Chaillout +1
Recent progresses in ultra low power microelectronics propelled the development of several microsensors and particularly the self powered microsystems (SPMS). One of their limitati…