13 citations · 24 across the 3 of their papers we have counts for
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cond-mat.mtrl-sci2012★ 11 cited
New DRIE-Patterned Electrets for Vibration Energy Harvesting
S. Boisseau, A. -B. Duret, J. -J. Chaillout +1
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electr…
cond-mat.mtrl-sci2011
Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters
S. Boisseau, A. B. Duret, G. Despesse +3
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electr…