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20082012
most citedA complete study of electroactive polymers for energy scavenging: modelling and experiments

13 citations · 24 across the 3 of their papers we have counts for

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cond-mat.mtrl-sci2011

Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters

S. Boisseau, A. B. Duret, G. Despesse +3

This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electr…