The origin of negative charging in amorphous Al${}_2$O${}_3$ films: The role of native defects

Oliver A. Dicks, Jonathon Cottom, Alexander L. Shluger +1

Amorphous aluminum oxide Al${}_2$O${}_3$ (a-Al${}_2$O${}_3$) layers grown by various deposition techniques contain a significant density of negative charges. In spite of several experiment…