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physics.ins-det2008
A Sensor with Analog and Digital Pixels in 0.15 micron SOI Technology
Marco Battaglia, Dario Bisello, Devis Contarato +5
A monolithic pixel sensor in deep-submicron Silicon-On-Insulator (SOI) CMOS technology has been designed, manufactured and characterised. This technology is of significant interest…
physics.ins-det2007★ 14 cited
A Monolithic Pixel Sensor in 0.15 micron Fully Depleted SOI Technology
Marco Battaglia, Dario Bisello, Devis Contarato +4
This letter presents the design of a monolithic pixel sensor with 10x10 micron^2 pixels in OKI 0.15 micron fully depleted SOI technology and first results of its characterisation.…