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eess.SP2026
Information-Theoretic Causal Modelling of Semiconductor Process Dynamics
Daniel Sørensen, Giorgio Melchiorre, Sudip Bandyopadhyay +3
With the progress of the semiconductor industry toward increasingly complex compute devices and tighter process tolerances, advanced process control has become crucial. This work e…
eess.SP2023
Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance
Bappaditya Dey, Anh Tuan Ngo, Sara Sacchi +3
Moore Law states that transistor density will double every two years, which is sustained until today due to continuous multi-directional innovations, such as extreme ultraviolet li…