33 citations · 112 across the 23 of their papers we have counts for
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cs.CV2022★ 1 cited
Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach
Bappaditya Dey, Enrique Dehaerne, Kasem Khalil +3
In this research work, we have demonstrated the application of Mask-RCNN (Regional Convolutional Neural Network), a deep-learning algorithm for computer vision and specifically obj…
eess.IV2022★ 33 cited
Deep Learning-Based Defect Classification and Detection in SEM Images
Bappaditya Deya, Dipam Goswamif, Sandip Haldera +3
This proposes a novel ensemble deep learning-based model to accurately classify, detect and localize different defect categories for aggressive pitches and thin resists (High NA ap…