most citedLarge Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training

3 citations · 3 across the 2 of their papers we have counts for

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cs.OH2022

Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks

Haoyu Yang, Zongyi Li, Kumara Sastry +6

Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models…