2 papers
cond-mat.supr-con2024
Technology of fabrication superconducting free-standing structures (FSS)
M. A. Tarkhov, A. M. Mumlyakov, M. V. Shibalov +5
In this study, a method for fabrication of superconducting microstructures that are partially or completely isolated from the substrate has been proposed. Two configurations of sus…
physics.optics2021
Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…