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physics.flu-dyn2021
Numerical study of acoustic cell trapping above elastic membrane disks driven in higher-harmonic modes by thin-film transducers with patterned electrodes
André G. Steckel, Henrik Bruus
Excitations of MHz acoustic modes are studied numerically in 10-um-thick silicon disk membranes with a radius of 100 and 500 um actuated by an attached 1-um-thick (AlSc)N thin-film…
physics.flu-dyn2021★ 18 cited
Bulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modes
André G. Steckel, Henrik Bruus
In acoustofluidics, acoustic resonance modes for fluid and microparticle handling are traditionally excited by bulk piezoelectric transducers. In this work, we demonstrate by numer…