most citedBulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modes

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physics.app-ph2020★ 15 cited

Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances

André G. Steckel, Henrik Bruus, Paul Muralt +1

We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin meta…