8 citations · 12 across the 5 of their papers we have counts for
6 papers
Low-confinement silicon nitride waveguides manufactured via direct glass bonding
Mikhail V. Tsvetkov, Dmitry V. Obydennov, Alexandr S. Rykov +6
Reducing the fabrication cost of photonic integrated circuits while maintaining low optical losses and technological simplicity is essential for their wider implementation. In conv…
Silicon nitride on-chip C-band spontaneous emission generation based on lanthanide doped microparticles
Dmitry V. Obydennov, Ilya M. Asharchuk, Alexander M. Mumlyakov +5
The integration of active light-emitting elements into planar photonic circuits on a silicon nitride platform remains challenging due to material incompatibilities and high-tempera…
Influence ScN protective thin layer on the superconducting properties of ultrathin NbN films
N. V. Porokhov, A. A. Anikanov, A. P. Sirotina +8
The present study delves into exploring the impact of a thin protective layer of scandium nitride (ScN) on the superconductive properties of thin films of niobium nitride (NbN) gen…
Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…
Wet Scandium Etching for hard mask formation on a silicon substrate
Julia Bondareva, Ekaterina Timofeeva, Alexandr Anikanov +6
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of t…
Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer
N. V. Porokhov, A. P. Sirotina, E. A. Pershina +9
The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has be…