5 papers
4-Pixel NbN Hot-Electron Bolometer Integrated in a SiN Planar Optical Waveguide with On-Chip Fiber-Alignment Trench
N. A. Vovk, G. A. Matveev, M. A. Mumlyakov +7
In this work, we design and characterize a 4-pixel superconducting hot-electron bolometer (HEB) based on niobium nitride (NbN), integrated with individual planar silicon nitride (S…
Practical way to increase nonlinearity of kinetic inductance of superconductor
Yu. P. Korneeva, M. A. Dryazgov, I. V. Trofimov +7
This work demonstrates that depositing a thin layer of Mo (5-15 nm) onto a 10 nm thick NbN strip leads to a significant increase in the nonlinearity of the kinetic inductance …
Technology of fabrication superconducting free-standing structures (FSS)
M. A. Tarkhov, A. M. Mumlyakov, M. V. Shibalov +5
In this study, a method for fabrication of superconducting microstructures that are partially or completely isolated from the substrate has been proposed. Two configurations of sus…
Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber
Maksim V. Shibalov, Ilya M. Asharchuk, Evgeniy O. Epifanov +5
This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength…
Superconducting TSV contact for cryoelectronic devices
Ivan Filippov, Alexandr Anikanov, Aleksandr Rykov +6
This work focuses on the fabrication of niobium through silicon vias (TSV) superconductors interconnects. The effect of supercycle of sequential oxidation and chemical etching proc…