121 citations · 198 across the 2 of their papers we have counts for
2 papers
physics.app-ph2018★ 121 cited
Nanopore fabrication and characterization by helium ion microscopy
D. Emmrich, A. Beyer, A. Nadzeyka +4
The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small bea…
quant-ph2017★ 77 cited
Scalable fabrication of single silicon vacancy defect arrays in silicon carbide using focused ion beam
Junfeng Wang, Xiaoming Zhang, Yu Zhou +8
In this work, we present a method for targeted, maskless, and scalable fabrication of single silicon vacancy (VSi) defect arrays in silicon carbide (SiC) using focused ion beam. Th…