Quantum transport properties of industrial ${}^{28}$Si/${}^{28}$SiO${}_2$

D. Sabbagh, N. Thomas, J. Torres +21

We investigate the structural and quantum transport properties of isotopically enriched ${}^{28}$Si/${}^{28}$SiO${}_2$ stacks deposited on 300 mm Si wafers in an industrial CMOS fab. Hig…