Phase-selective growth of $\kappa$- vs $\beta$-Ga${}_2$O${}_3$ and (In${}_x$Ga${}_{1-x}$)${}_2$O${}_3$ by In-mediated metal exchange catalysis in plasma-assisted molecular beam epitaxy

A. Ardenghi, O. Bierwagen, J. Lähnemann +4

Its piezo- and potentially ferroelectric properties make the metastable kappa polymorph of Ga${}_2$O${}_3$ an interesting material for multiple applications, while In-incorporation int…