12 citations · 21 across the 5 of their papers we have counts for
5 papers
Photoemission Spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
Faegheh S. Sajjadian, Laura Galleni, Kevin M. Dorney +5
Device architectures and dimensions are now at an unimaginable level not thought possible even 10 years ago. The continued downscaling, following the so-called Moore's law, has mot…
Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization
Enrique Dehaerne, Bappaditya Dey, Sandip Halder +1
As semiconductor patterning dimensions shrink, more advanced Scanning Electron Microscopy (SEM) image-based defect inspection techniques are needed. Recently, many Machine Learning…
Guiding principles for the design of a chemical vapor deposition process for highly crystalline transition metal dichalcogenides
Vladislav Voronenkov, Benjamin Groven, Henry Medina Silva +2
Two-dimensional transition metal dichalcogenides (TMDs) for advanced logic transistor technologies are deposited by various modifications of the chemical vapor deposition (CVD) met…
Microwave Properties of Ba-Substituted Pb(ZrTi)O after Chemical-Mechanical Polishing
Federica Luciano, Lieve Teugels, Sean McMitchell +13
We have studied the effect of chemical-mechanical polishing (CMP) on the ferroelectric, piezoelectric, and microwave dielectric properties of Ba-substituted PZT (BPZT), deposited b…
Towards twin-free molecular beam epitaxy of 2D chalcogenides explained by stronger interlayer van der Waals coupling
Wouter Mortelmans, Karel De Smet, Ruishen Meng +4
Defect-free epitaxial growth of 2D materials is one of the holy grails for a successful integration of van der Waals (vdW) materials in the semiconductor industry. The large-area (…