12 citations · 21 across the 5 of their papers we have counts for
3 papers · 1 filter
Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization
Enrique Dehaerne, Bappaditya Dey, Sandip Halder +1
As semiconductor patterning dimensions shrink, more advanced Scanning Electron Microscopy (SEM) image-based defect inspection techniques are needed. Recently, many Machine Learning…
Guiding principles for the design of a chemical vapor deposition process for highly crystalline transition metal dichalcogenides
Vladislav Voronenkov, Benjamin Groven, Henry Medina Silva +2
Two-dimensional transition metal dichalcogenides (TMDs) for advanced logic transistor technologies are deposited by various modifications of the chemical vapor deposition (CVD) met…
Microwave Properties of Ba-Substituted Pb(ZrTi)O after Chemical-Mechanical Polishing
Federica Luciano, Lieve Teugels, Sean McMitchell +13
We have studied the effect of chemical-mechanical polishing (CMP) on the ferroelectric, piezoelectric, and microwave dielectric properties of Ba-substituted PZT (BPZT), deposited b…