Modeling the Initial Stages of Si(100) Thermal Oxidation: An Ab-initio Approach

Lukas Cvitkovich, Dominic Waldhör, Al-Moatassem El-Sayed +3

Silicon together with its native oxide SiO${}_2$ was recognized as an outstanding material system for the semiconductor industry in the 1950s. In state-of-the-art device technology,…