most citedAn Efficient Molecular Dynamics Scheme for the Calculation of Dopant Profiles due to Ion Implantation

67 citations · 166 across the 6 of their papers we have counts for

collaborators

6 papers

cond-mat.mtrl-sci2006★ 16 cited

Vacancy clustering and diffusion in silicon: Kinetic lattice Monte Carlo simulations

Benjamin P. Haley, Keith M. Beardmore, Niels Grønbech-Jensen

Diffusion and clustering of lattice vacancies in silicon as a function of temperature, concentration, and interaction range are investigated by Kinetic Lattice Monte Carlo simulati…

cond-mat.soft1999

Interactions Between Charged Spheres in Divalent Counterion Solution

Niels Gronbech-Jensen, Keith M Beardmore, Philip Pincus

We simulate model systems of charged spherical particles in their counterion solution and measure the thermodynamic pressure and the pair distribution function from which we derive…

physics.comp-ph1999★ 24 cited

Simulation of phosphorus implantation into silicon with a single-parameter electronic stopping power model

D. Cai, C. M. Snell, K. M. Beardmore +1

We simulate dopant profiles for phosphorus implantation into silicon using a new model for electronic stopping power. In this model, the electronic stopping power is factorized int…

physics.comp-ph1999★ 67 cited

An Efficient Molecular Dynamics Scheme for the Calculation of Dopant Profiles due to Ion Implantation

Keith M. Beardmore, Niels Gronbech-Jensen

We present a highly efficient molecular dynamics scheme for calculating the concentration depth profile of dopants in ion irradiated materials. The scheme incorporates several meth…

cond-mat.mtrl-sci1999★ 12 cited

An Efficient Molecular Dynamics Scheme for Predicting Dopant Implant Profiles in Semiconductors

Keith M. Beardmore, Niels Gronbech-Jensen

We present a highly efficient molecular dynamics scheme for calculating the concentration profile of dopants implanted in group-IV alloy, and III-V zinc blende structure materials.…

cond-mat.mtrl-sci1999★ 47 cited

Direct simulation of ion beam induced stressing and amorphization of silicon

Keith M. Beardmore, Niels Gronbech-Jensen

Using molecular dynamics (MD) simulation, we investigate the mechanical response of silicon to high dose ion-irradiation. We employ a realistic and efficient model to directly simu…