42 citations · 122 across the 16 of their papers we have counts for
4 papers · 1 filter
Machine learning for advancing low-temperature plasma modeling and simulation
Jan Trieschmann, Luca Vialetto, Tobias Gergs
Machine learning has had an enormous impact in many scientific disciplines. Also in the field of low-temperature plasma modeling and simulation it has attracted significant interes…
PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
Teresa de los Arcos, Peter Awakowicz, Marc Böke +19
This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar prec…
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
Teresa de los Arcos, Peter Awakowicz, Jan Benedikt +17
This feature article considers the analysis of the initial states of film growth on polymer substrates. The assembled results are based on the cooperation between research groups i…
Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N discharges on experimental timescales
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Understanding and modeling plasma-surface interactions frame a multi-scale as well as multi-physics problem. Scale-bridging machine learning surface surrogate models have been demo…