42 citations · 122 across the 16 of their papers we have counts for
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cond-mat.mtrl-sci2022★ 14 cited
Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Simulations of Al thin film sputter depositions rely on accurate plasma and surface interaction models. Establishing the latter commonly requires a higher level of abstraction and…
physics.plasm-ph2022★ 1 cited
Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Plasma-surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential t…