42 citations · 122 across the 16 of their papers we have counts for
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cond-mat.mtrl-sci2021★ 8 cited
Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Molecular dynamics simulations are often used to study sputtering and thin film growth. Compressive stresses in these thin films are generally assumed to be caused by a combination…
physics.comp-ph2021★ 1 cited
An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
Tobias Gergs, Borislav Borislavov, Jan Trieschmann
Simulations of thin film sputter deposition require the separation of the plasma and material transport in the gas-phase from the growth/sputtering processes at the bounding surfac…