most citedSilicon Nitride Stress Liner Impacts on the Electrical Characteristics of AlGaN/GaN HEMTs

1 citations · 2 across the 3 of their papers we have counts for

collaborators

7 papers

physics.app-ph20191 cited

Silicon Nitride Stress Liner Impacts on the Electrical Characteristics of AlGaN/GaN HEMTs

Wei-Chih Cheng, Tao Fang, Siqi Lei +7

Due to the piezoelectric nature of GaN, the 2DEG in AlGaN/GaN HEMT could be engineered by strain. In this work, SiNx deposited using dual-frequency PECVD was used as a stressor. Th…

cond-mat.mtrl-sci20191 cited

Improved Thin Film Quality and Photoluminescence of N-Doped Epitaxial Germanium-on-Silicon using MOCVD

Guangnan Zhou, Alejandra V. Cuervo Covian, Kwang Hong Lee +4

Ge-on-Si structures in-situ doped with phosphorus or arsenic via metal organic chemical vapor deposition (MOCVD) were investigated. Surface roughness, strain, threading dislocation…

cond-mat.mtrl-sci2019

A wet etching method for few-layer black phosphorus with an atomic accuracy and compatibility with major lithography techniques

Teren Liu, Tao Fang, Karen Kavanagh +2

This paper reports a few-layer black phosphorus thickness pattern fabricated by a top-down nanofabrication approach. This was achieved by a new wet etching process that can etch se…

cond-mat.mtrl-sci2019

Interdiffusion in Group IV Semiconductor Material Systems: Applications, Research Methods and Discoveries

Guangrui, Xia

Group IV semiconductor alloys and heterostructures such as SiGe, GeSn, Ge/Si and SiGe:C have been widely used and under extensive research for applications in major microelectronic…

cond-mat.mtrl-sci2018

Experiments and Modeling of Mass Transport Phenomena in SiGe Devices

Guangrui, Xia

Recent experiments and continuum modeling work on dopant diffusion and segregation, Si-Ge interdiffusion, and defect engineering in SiGe material systems are reviewed. Doping impac…

cond-mat.mtrl-sci2018

The stability of exfoliated FeSe nanosheets during in-air device fabrication process

Rui Yang, Weijun Luo, Shun Chi +2

We studied the stability and superconductivity of FeSe nanosheets during an in-air device fabrication process. Methods were developed to improve the exfoliation yield and to mainta…