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20182021
most citedOn the electron energy distribution function in the high power impulse magnetron sputtering discharge

23 citations · 45 across the 3 of their papers we have counts for

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cond-mat.mtrl-sci2019

The role of ionization fraction on the surface roughness, density and interface mixing of the films deposited by thermal evaporation, dc magnetron sputtering and HiPIMS: An atomistic simulation

Movaffaq Kateb, Hamidreza Hajihoseini, Jon Tomas Gudmundsson +1

We explore the effect of ionization fraction on the epitaxial growth of Cu film on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (…