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20182021
most citedOn the electron energy distribution function in the high power impulse magnetron sputtering discharge

23 citations · 45 across the 3 of their papers we have counts for

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cond-mat.mtrl-sci2018★ 22 cited

Comparison of magnetic and structural properties of permalloy Ni80Fe20 grown by dc and high power impulse magnetron sputtering

Movaffaq Kateb, Hamidreza Hajihoseini, Jon Tomas Gudmundsson +1

We study the microstructure and magnetic properties of Ni80Fe20 thin films grown by high power impulse magnetron sputtering (HiPIMS), and compare with films grown by dc magnetron s…