23 citations · 23 across the 2 of their papers we have counts for
3 papers
On the electron energy distribution function in the high power impulse magnetron sputtering discharge
Martin Rudolph, A. Revel, D. Lundin +6
We apply the Ionization Region Model (IRM) and the Orsay Boltzmann equation for ELectrons coupled with Ionization and eXcited states kinetics (OBELIX) model to study the electron k…
The role of ionization fraction on the surface roughness, density and interface mixing of the films deposited by thermal evaporation, dc magnetron sputtering and HiPIMS: An atomistic simulation
Movaffaq Kateb, Hamidreza Hajihoseini, Jon Tomas Gudmundsson +1
We explore the effect of ionization fraction on the epitaxial growth of Cu film on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (…
Comparison of magnetic and structural properties of permalloy Ni80Fe20 grown by dc and high power impulse magnetron sputtering
Movaffaq Kateb, Hamidreza Hajihoseini, Jon Tomas Gudmundsson +1
We study the microstructure and magnetic properties of Ni80Fe20 thin films grown by high power impulse magnetron sputtering (HiPIMS), and compare with films grown by dc magnetron s…