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20172025
most citedReconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver

39 citations · 78 across the 7 of their papers we have counts for

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physics.optics2025

High-quality Blazed Gratings through Synergy between E-Beam lithography and Robust Characterisation Techniques

Analía F. Herrero, Nazanin Samadi, Andrey Sokolov +8

Maintaining the highest quality and output of photon science in the VUV-, EUV-, soft- and tender-X-ray energy ranges requires high-quality blazed profile gratings. Currently, their…