39 citations · 78 across the 7 of their papers we have counts for
7 papers
High-quality Blazed Gratings through Synergy between E-Beam lithography and Robust Characterisation Techniques
Analía F. Herrero, Nazanin Samadi, Andrey Sokolov +8
Maintaining the highest quality and output of photon science in the VUV-, EUV-, soft- and tender-X-ray energy ranges requires high-quality blazed profile gratings. Currently, their…
Wafer-scale Synthesis of Mithrene and its Application in 2D Heterostructure UV Photodetectors
Maryam Mohammadi, Stefanie L. Stoll, Analía F. Herrero +6
Silver phenylselenide (AgSePh), known as mithrene, is a two-dimensional (2D) organic-inorganic chalcogenide (MOC) semiconductor with a wide direct band gap, narrow blue emission an…
Polygon-based unified Fourier-modal approach for diffractive optics simulations
K. V. Nikolaev, V. Soltwisch, M. A. Botchev +4
In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a comput…
On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
Analía Fernández Herrero, Victor Soltwisch, Mika Pflüger +2
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive m…
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…
Characteristic diffuse scattering from distinct line roughnesses
Analía Fernández Herrero, Mika Pflüger, Frank Scholze +1
Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electr…
Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Victor Soltwisch, Analia Fernandez Herrero, Mika Pflüger +5
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape.…