39 citations · 78 across the 7 of their papers we have counts for
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physics.comp-ph2024
Polygon-based unified Fourier-modal approach for diffractive optics simulations
K. V. Nikolaev, V. Soltwisch, M. A. Botchev +4
In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a comput…
physics.comp-ph2017★ 39 cited
Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Victor Soltwisch, Analia Fernandez Herrero, Mika Pflüger +5
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape.…