412 citations · 486 across the 15 of their papers we have counts for
3 papers · 1 filter
Resistless EUV lithography: photon-induced oxide patterning on silicon
Li-Ting Tseng, Prajith Karadan, Dimitrios Kazazis +7
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading litho…
Altermagnetic lifting of Kramers spin degeneracy
J. Krempaský, L. Šmejkal, S. W. D'Souza +20
Lifted Kramers spin-degeneracy has been among the central topics of condensed-matter physics since the dawn of the band theory of solids. It underpins established practical applica…
Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy
Taylor J. Z. Stock, Oliver Warschkow, Procopios C. Constantinou +8
Over the last two decades, prototype devices for future classical and quantum computing technologies have been fabricated, by using scanning tunneling microscopy and hydrogen resis…