29 citations · 46 across the 2 of their papers we have counts for
3 papers
Fabrication of superconducting through-silicon vias
Justin L. Mallek, Donna-Ruth W. Yost, Danna Rosenberg +15
Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic syst…
Solid-state qubits integrated with superconducting through-silicon vias
Donna-Ruth W. Yost, Mollie E. Schwartz, Justin Mallek +14
As superconducting qubit circuits become more complex, addressing a large array of qubits becomes a challenging engineering problem. Dense arrays of qubits benefit from, and may re…
Planarized Fabrication Process With Two Layers of SIS Josephson Junctions and Integration of SIS and SFS π-Junctions
Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +6
We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-m…