125 citations · 327 across the 6 of their papers we have counts for
6 papers
Fabrication of superconducting through-silicon vias
Justin L. Mallek, Donna-Ruth W. Yost, Danna Rosenberg +15
Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic syst…
Solid-state qubits integrated with superconducting through-silicon vias
Donna-Ruth W. Yost, Mollie E. Schwartz, Justin Mallek +14
As superconducting qubit circuits become more complex, addressing a large array of qubits becomes a challenging engineering problem. Dense arrays of qubits benefit from, and may re…
Planarized Fabrication Process With Two Layers of SIS Josephson Junctions and Integration of SIS and SFS π-Junctions
Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +6
We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-m…
Superconductor Electronics Fabrication Process with MoN Kinetic Inductors and Self-Shunted Josephson Junctions
Sergey K. Tolpygo, Vladimir Bolkhovsky, D. E. Oates +6
Recent progress in superconductor electronics fabrication has enabled single-flux-quantum (SFQ) digital circuits with close to one million Josephson junctions (JJs) on 1-cm chi…
Developments Toward a 250-nm, Fully Planarized Fabrication Process With Ten Superconducting Layers And Self-Shunted Josephson Junctions
Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +5
We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junc…
Properties of Unshunted and Resistively Shunted Nb/AlOx-Al/Nb Josephson Junctions With Critical Current Densities from 0.1 mA/μm^2 to 1 mA/μm^2
Sergey K. Tolpygo, Vladimir Bolkhovsky, Scott Zarr +5
We investigated current-voltage characteristics of unshunted and externally shunted Josephson junctions (JJs) with high critical current densities, Jc, in order to extract their ba…