37 citations · 87 across the 5 of their papers we have counts for
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cond-mat.mes-hall2018★ 15 cited
Spontaneous parametric down-conversion induced by non-degenerate three-wave mixing in a scanning MEMS micro mirror
Ulrike Nabholz, Frank Schatz, Jan E. Mehner +1
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as…
cond-mat.mes-hall2018★ 37 cited
Amplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors
Ulrike Nabholz, Wolfgang Heinzelmann, Jan E. Mehner +1
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes…