Spontaneous parametric down-conversion induced by non-degenerate three-wave mixing in a scanning MEMS micro mirror
arXiv:1810.07397 · doi:10.1038/s41598-019-40377-0
Abstract
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS applications, the geometric structure is typically designed to serve a number of functional requirements. Most importantly, the mode spectrum contains a single high-Q mode, the drive mode, which per design is expected to yield the only resonantly excited geometric motion during operation. Yet here, we report on the observation of a resonant three-mode excitation via a process known as spontaneous parametric down-conversion. We show that this phenomenon, most extensively studied in the field of nonlinear optics, originates from three-wave coupling induced by geometric nonlinearities. In combination with further Duffing-type nonlinearities, the micro mirror displays a variety of nonlinear dynamical behaviour ranging from stationary state bifurcations to dynamical instabilities observable via amplitude modulations. We are able to explain and emulate all experimental observations using a single fundamental model. In particular, our analysis allows us to understand the conditions for the onset of three-wave down-conversion which if not accounted for in the design of the MEMS structure, can have drastic impact on its functionality even leading to fracture.
arXiv commentrevised version
References in corpus (12)
- Cavity Optomechanics
- Quantum information with continuous variables
- Gaussian Quantum Information
- A gravitational wave observatory operating beyond the quantum shot-noise limit: Squeezed light in application
- Confining the state of light to a quantum manifold by engineered two-photon loss
- Observation of squeezed light with 10dB quantum noise reduction
- Observation of -9 dB quadrature squeezing with improvement of phase stability in homodyne measurement
- A Versatile Source of Single Photons for Quantum Information Processing
- Nonlinear modal coupling in a high-stress doubly-clamped nanomechanical resonator
- Amplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors
- Self-Consistent Projection Operator Theory in Nonlinear Quantum Optical Systems: A case study on Degenerate Optical Parametric Oscillators
- Degenerate optomechanical parametric oscillators: cooling in the vicinity of a critical point
Cited by in corpus (4)
- Shape Optimization of Geometrically Nonlinear Modal Coupling Coefficients: An Application to MEMS Gyroscopes
- Spontaneous parametric down-conversion induced by optomechanical gradient forces in nanophotonic waveguides
- Validating the Critical Point of Spontaneous Parametric Down-Conversion for over 600 Scanning MEMS Micro Mirrors on Wafer-Level
- Analysis of Side-band Inequivalence