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20182020
most citedAmplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors

37 citations · 87 across the 5 of their papers we have counts for

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physics.app-ph2019★ 2 cited

Validating the Critical Point of Spontaneous Parametric Down-Conversion for over 600 Scanning MEMS Micro Mirrors on Wafer-Level

Ulrike Nabholz, Florian Stockmar, Jan E. Mehner +1

Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the ar…