11 citations · 19 across the 2 of their papers we have counts for
3 papers
Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration
Jake A. McCoy, Randall L. McEntaffer, Chad M. Eichfeld
Thermally activated selective topography equilibration (TASTE) enables the creation of 3D structures in resist using grayscale electron-beam lithography followed by a thermal treat…
X-ray verification of sol-gel resist shrinkage in substrate-conformal imprint lithography for a replicated blazed reflection grating
Jake A. McCoy, Marc A. Verschuuren, Drew M. Miles +1
Surface-relief gratings fabricated through nanoimprint lithography (NIL) are prone to topographic distortion induced by resist shrinkage. Characterizing the impact of this effect o…
Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration
Jake A. McCoy, Randall L. McEntaffer, Drew M. Miles
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groo…