18 citations · 38 across the 6 of their papers we have counts for
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physics.app-ph2020★ 8 cited
X-ray verification of sol-gel resist shrinkage in substrate-conformal imprint lithography for a replicated blazed reflection grating
Jake A. McCoy, Marc A. Verschuuren, Drew M. Miles +1
Surface-relief gratings fabricated through nanoimprint lithography (NIL) are prone to topographic distortion induced by resist shrinkage. Characterizing the impact of this effect o…
astro-ph.IM2020★ 18 cited
Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration
Jake A. McCoy, Randall L. McEntaffer, Drew M. Miles
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groo…