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20202024
most citedFabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration

11 citations · 20 across the 4 of their papers we have counts for

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physics.app-ph2020★ 8 cited

X-ray verification of sol-gel resist shrinkage in substrate-conformal imprint lithography for a replicated blazed reflection grating

Jake A. McCoy, Marc A. Verschuuren, Drew M. Miles +1

Surface-relief gratings fabricated through nanoimprint lithography (NIL) are prone to topographic distortion induced by resist shrinkage. Characterizing the impact of this effect o…