107 citations · 316 across the 9 of their papers we have counts for
10 papers
Effect of Near-surface Thermal Spikes on Radiation Hardness of Gallium Oxide
Tomás Fernández Bouvier, Umutcan Bektas, Alexander Azarov +10
Gallium oxide (GaO) stands out as an extraordinary high radiation-tolerant semiconductor, because its lattice displacements induce polymorph transitions, holding materi…
Defect analysis of the - to -GaO phase transition
Umutcan Bektas, Maciej O. Liedke, Huan Liu +7
In this study, we investigate the ion-irradiation-induced phase transition in gallium oxide (Ga2O3) from the to the phase, the role of defects during the transformation, an…
Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams
M. Hollenbach, N. Klingner, P. Mazarov +8
Carbon implantation at the nanoscale is highly desired for the engineering of defect-based qubits in a variety of materials, including silicon, diamond, SiC and hBN. However, the l…
Roadmap for focused ion beam technologies
Katja Höflich, Gerhard Hobler, Frances I. Allen +29
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was or…
Universal radiation tolerant semiconductor
Alexander Azarov, Javier García Fernández, Junlei Zhao +10
Radiation tolerance is determined as the ability of crystalline materials to withstand the accumulation of the radiation induced disorder. Nevertheless, for sufficiently high fluen…
Wafer-scale nanofabrication of telecom single-photon emitters in silicon
M. Hollenbach, N. Klingner, N. S. Jagtap +9
A highly promising route to scale millions of qubits is to use quantum photonic integrated circuits (PICs), where deterministic photon sources, reconfigurable optical elements, and…
Effects of Alloying Elements on Surface Oxides of Hot-Dip Galvanized Press Hardened Steel
Wolfgang Gaderbauer, Martin Arndt, Tia Truglas +5
Effects of steel alloying elements on the formation of the surface oxide layer of hot-dip galvanized press hardened steel after austenitization annealing were examined with various…
Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
Lothar Bischoff, Nico Klingner, Paul Mazarov +2
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the…
Morphology modifcation of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm
Xiaomo Xu, Karl-Heinz Heinig, Wolfhard Möller +6
Si nanopillars of less than 50 nm diameter have been irradiated in a helium ion microscope with a focused Ne beam. The morphological changes due to ion beam irradiation at room…
Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry
Nico Klingner, René Heller, Gregor Hlawacek +4
Time of flight backscattering spectrometry (ToF-BS) was successfully implemented in a helium ion microscope (HIM). Its integration introduces the ability to perform laterally resol…