107 citations · 316 across the 9 of their papers we have counts for
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Roadmap for focused ion beam technologies
Katja Höflich, Gerhard Hobler, Frances I. Allen +29
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was or…
Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
Lothar Bischoff, Nico Klingner, Paul Mazarov +2
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the…
Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry
Nico Klingner, René Heller, Gregor Hlawacek +4
Time of flight backscattering spectrometry (ToF-BS) was successfully implemented in a helium ion microscope (HIM). Its integration introduces the ability to perform laterally resol…