20 citations · 38 across the 7 of their papers we have counts for
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physics.optics2024★ 3 cited
Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays
Leonhard M. Lohr, Richard Ciesielski, Vinh-Binh Truong +1
Scatterometry is a tested method for measuring periodic semiconductor structures. Since the sizes of modern semiconductor structures have reached the nanoscale regime, the challeng…
physics.comp-ph2024
Polygon-based unified Fourier-modal approach for diffractive optics simulations
K. V. Nikolaev, V. Soltwisch, M. A. Botchev +4
In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a comput…