108 citations · 626 across the 22 of their papers we have counts for
Showing physics.opticsShow all
2 papers · 1 filter
physics.optics2024★ 3 cited
Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays
Leonhard M. Lohr, Richard Ciesielski, Vinh-Binh Truong +1
Scatterometry is a tested method for measuring periodic semiconductor structures. Since the sizes of modern semiconductor structures have reached the nanoscale regime, the challeng…
physics.optics2021★ 14 cited
Time-frequency analysis assisted reconstruction of ruthenium optical constants in the sub-EUV spectral range 8nm-23.75nm
Qais Saadeh, Philipp Naujok, Vicky Philipsen +9
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film…