108 citations · 626 across the 22 of their papers we have counts for
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Grazing incidence X-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
Anna Andrle, Philipp Hönicke, Philipp Schneider +6
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Usi…
On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
Analía Fernández Herrero, Victor Soltwisch, Mika Pflüger +2
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive m…
Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt +4
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic…
Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
Philipp Hönicke, Anna Andrle, Yves Kayser +6
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor…
The refined EUV mask model
I. A. Makhotkin, M. Wu, V. Soltwisch +2
A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facili…
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…
Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings
Analía Fernández Herrero, Mika Pflüger, Jürgen Probst +2
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexit…
Characteristic diffuse scattering from distinct line roughnesses
Analía Fernández Herrero, Mika Pflüger, Frank Scholze +1
Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electr…
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Victor Soltwisch, Philipp Hönicke, Yves Kayser +4
The geometry of a SiN lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are u…