108 citations · 626 across the 22 of their papers we have counts for
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Grazing incidence X-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
Anna Andrle, Philipp Hönicke, Philipp Schneider +6
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Usi…
On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
Analía Fernández Herrero, Victor Soltwisch, Mika Pflüger +2
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive m…
Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt +4
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic…