39 citations · 167 across the 8 of their papers we have counts for
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physics.app-ph2019★ 24 cited
Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings
Analía Fernández Herrero, Mika Pflüger, Jürgen Probst +2
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexit…
cond-mat.mes-hall2019★ 3 cited
Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with GISAXS
Mika Pflüger, Victor Soltwisch, Jolly Xavier +4
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic…