39 citations · 167 across the 8 of their papers we have counts for
8 papers
Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
Philipp Hönicke, Anna Andrle, Yves Kayser +6
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor…
Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings
Analía Fernández Herrero, Mika Pflüger, Jürgen Probst +2
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexit…
Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with GISAXS
Mika Pflüger, Victor Soltwisch, Jolly Xavier +4
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic…
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Victor Soltwisch, Philipp Hönicke, Yves Kayser +4
The geometry of a SiN lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are u…
Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Victor Soltwisch, Analia Fernandez Herrero, Mika Pflüger +5
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape.…
Grazing Incidence Small Angle X-Ray Scattering (GISAXS) on Small Targets Using Large Beams
Mika Pflüger, Victor Soltwisch, Jürgen Probst +2
GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footpr…