39 citations · 167 across the 8 of their papers we have counts for
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physics.comp-ph2017★ 39 cited
Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Victor Soltwisch, Analia Fernandez Herrero, Mika Pflüger +5
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape.…
cond-mat.mes-hall2017★ 37 cited
Grazing Incidence Small Angle X-Ray Scattering (GISAXS) on Small Targets Using Large Beams
Mika Pflüger, Victor Soltwisch, Jürgen Probst +2
GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footpr…