Interlayer-engineered local epitaxial templating induced enhancement in polarization (2P${}_r$ > 70$\mu$C/cm${}^2$) in Hf${}_{0.5}$Zr${}_{0.5}$O${}_2$ thin films

Srinu Rowtu, Paritosh Meihar, Adityanarayan Pandey +3

In this work, we report a high remnant polarization, 2Pr >70$\mu$C/cm${}^2$ in thermally processed atomic layer deposited Hf0.5Zr0.5O2 (HZO) film on Silicon with NH3 plasma exposed thi…