$\beta$-Ga${}_2$O${}_3$ Trench Schottky Diodes by Novel Low-Damage Ga-Flux Etching

Sushovan Dhara, Nidhin Kurian Kalarickal, Ashok Dheenan +3

$\beta$-Ga${}_2$O${}_3$ trench Schottky barrier diodes fabricated through a Gallium atomic beam etching technique, with excellent field strength and power device figure of merit, are demon…