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physics.app-ph2020
Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample
Navid Abedzadeh, M. A. R. Krielaart, Chung-Soo Kim +4
The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work,…
physics.ins-det2020
Image-Histogram-based Secondary Electron Counting to Evaluate Detective Quantum Efficiency in SEM
Akshay Agarwal, John Simonaitis, Karl K. Berggren
Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these…